Mikromechanik

Übersichtsartikel & Infos

Fundamentals of MEMS = micro-electro-mechanical systems,
Mikromechanik, Mikrotechnik, Mikrosystemtechnik (MST), microsystems,
Halbleiter / Semiconductor,
Silicon / Silicium,
Quartz / Quarz,
piezoelectric thin-film technology (ZnO, AlN)

Name		Name	Last commit message	Last commit date
Latest commit History 69 Commits
1996-02-HdT		1996-02-HdT
Figures		Figures
HSG-IMIT		HSG-IMIT
1987-08_Reinräume-in-der-Mikrotechnik.pdf		1987-08_Reinräume-in-der-Mikrotechnik.pdf
1987-12_ANWENDUNG-LASERSTRAHLEN-ZUR-HERSTELLUNG- MIKROSTRUKTUREN.pdf		1987-12_ANWENDUNG-LASERSTRAHLEN-ZUR-HERSTELLUNG- MIKROSTRUKTUREN.pdf
1989-01-11_Programm-Mikrosystemtechnik.pdf		1989-01-11_Programm-Mikrosystemtechnik.pdf
1989-04_FFMU_anisotropen_Aetzen_von_Silizium.pdf		1989-04_FFMU_anisotropen_Aetzen_von_Silizium.pdf
1990_Entwicklung-Zinndioxid-Gassensor_Dickschicht-Technologie.pdf		1990_Entwicklung-Zinndioxid-Gassensor_Dickschicht-Technologie.pdf
1990_MST_ICC-Berlin.JPG		1990_MST_ICC-Berlin.JPG
1991-01-16_Mikrosystemtechnik_Stuttgart-Buesnau.pdf		1991-01-16_Mikrosystemtechnik_Stuttgart-Buesnau.pdf
1991-01_Positionspapier_MIKROSYSTEMTECHNIK_VDE-VDI-GME.pdf		1991-01_Positionspapier_MIKROSYSTEMTECHNIK_VDE-VDI-GME.pdf
1991-03_Mechanical-Resonance_UNIV-California.pdf		1991-03_Mechanical-Resonance_UNIV-California.pdf
1991-04_Use of FIDAP in sensor and valve Optimization problems.pdf		1991-04_Use of FIDAP in sensor and valve Optimization problems.pdf
1991-06_SCHROTH.DPL		1991-06_SCHROTH.DPL
1991-06_SCHROTH.doc		1991-06_SCHROTH.doc
1991-06_SCHROTH.pdf		1991-06_SCHROTH.pdf
1991-11_Technologien-Herstellung-mikromechanischer-Bauelemente.pdf		1991-11_Technologien-Herstellung-mikromechanischer-Bauelemente.pdf
1991_FREQU-DEPENDENCE-THERM-EXCITATION-MICROMECHANICAL-Resonators.pdf		1991_FREQU-DEPENDENCE-THERM-EXCITATION-MICROMECHANICAL-Resonators.pdf
1991_Q-FACTOR AND FREQUENCY SHIFT OF RESONATING SI DIAPHRAGMS in Air.pdf		1991_Q-FACTOR AND FREQUENCY SHIFT OF RESONATING SI DIAPHRAGMS in Air.pdf
1991_VDI-Technologietrends_Frequenzanaloge-Sensoren.pdf		1991_VDI-Technologietrends_Frequenzanaloge-Sensoren.pdf
1993-03-31_Verbundforschung-MST_Frequenzanaloge-Sensoren.pdf		1993-03-31_Verbundforschung-MST_Frequenzanaloge-Sensoren.pdf
1993-06_Thermally-driven-micromechanical-bridge-resonator.pdf		1993-06_Thermally-driven-micromechanical-bridge-resonator.pdf
1996_EURO-DAC_Spotlights on Recent Developments in Microsystem.pdf		1996_EURO-DAC_Spotlights on Recent Developments in Microsystem.pdf
1996_Spotlights on Recent Developments in Microsystem.pdf		1996_Spotlights on Recent Developments in Microsystem.pdf
README.md		README.md

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