ThomasFabula / BIMORPH Public

BIMORPH : MEMS microactuator based on silicon diaphragm with piezoceramic, Material properties via BIMORPH.MAT, piezo-electric BIMORPH microactuator

2 stars 0 forks Branches Tags Activity

Notifications

Name		Name	Last commit message	Last commit date
Latest commit History 22 Commits
ANSYS		ANSYS
BOSCH		BOSCH
1992-09-29_Si-Membranen-Modalanalyse.pdf		1992-09-29_Si-Membranen-Modalanalyse.pdf
README.md		README.md

Repository files navigation

BIMORPH

MEMS

MEMS microactuator based on silicon diaphragm with piezoceramic (PZT)
Material properties via BIMORPH.MAT
piezo-electric BIMORPH microactuator

Further information

About

BIMORPH : MEMS microactuator based on silicon diaphragm with piezoceramic, Material properties via BIMORPH.MAT, piezo-electric BIMORPH microactuator

simulation sensor verification fem finite-elements piezo finite-element-analysis silicon mems finite-element-methods piezoelectric-sensors resonant-frequency bimorph microactuator

Report repository

Releases

No releases published

Packages

No packages published

Languages

GLSL 100.0%