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ThomasFabula / Modeling-of-Resonant-Silicon-Microsensors

Analytical & numerical modeling of resonant Silicon Microsensors, invited paper Sensors & Materials

analytics simulation sensor transducers fem finite-elements sensors finite-element-analysis silicon mems finite-element-methods resonant resonator microtech resonant-frequency thinfilm zinkoxid

Updated May 23, 2024

ThomasFabula / FASENS_Si-ZnO_M723

FASENS: POLYTEC + GAIN-PHASE Messungen, Modenprofilaufnahme, Abgriff: optisch, Stahlträger geklebt. Si-Membran + ZnO-Schicht M7-2/3

experimental sensor frequency-analysis resonance silicon mems pressure-sensor zno bosch-sensor microsystems resonant-frequency zinkoxid

Updated Apr 17, 2024
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ThomasFabula / Actuators

Aktoren-Antrieb mit piezoelektrische Duennschichten - ZnO/AlN, etc.

actuators silicon piezoelectric zno thinfilm zinkoxid aktor aktuator

Updated Apr 20, 2024
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ThomasFabula / papers

Papers & Publications

sensor transducers finite-elements sensors papers finite-element-analysis transducer silicon mems finite-element-methods ansys silicium zno piezo-sensor piezo-actuator piezoelectric-materials piezoelectric-sensors silizium zinkoxid

Updated Jun 5, 2024
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