A document containing the basic physics of radio frequency (RF) plasmas
This document should give an insight to plasma processes ocuring in RF plasmas.
Feel free to use it for practical usage or lectures.
If you encounter mistakes, please report them or send a patch.
The document was written using the LaTeX frontend LyX. Since it is nevertheless a LaTeX file, you should be able to generate the PDF using any LaTeX distribution of your choice. (Commonly used distributions are for example MikTeX and TeX Live.)