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Analytical & numerical modeling of resonant Silicon Microsensors, invited paper Sensors & Materials

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Name		Name	Last commit message	Last commit date
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Analytics		Analytics
BOSCH		BOSCH
FEM		FEM
Figures		Figures
References		References
paper		paper
1992-10_Dynamische-Berechnungen-MEMS_Folien.pdf		1992-10_Dynamische-Berechnungen-MEMS_Folien.pdf
README.md		README.md

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Modeling-of-Resonant-Silicon-Microsensors

Analytical calculations

ANALYTISCHE AUSLEGUNG VON RESONANTEN SENSOREN

Numercial finite-element analyses (FEM)

MEMS

Silicon & Quartz resonators,
piezoelectric ZnO thin-film layers

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Analytical & numerical modeling of resonant Silicon Microsensors, invited paper Sensors & Materials

analytics simulation sensor transducers fem finite-elements sensors finite-element-analysis silicon mems finite-element-methods resonant resonator microtech resonant-frequency thinfilm zinkoxid

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