ANSYS(TM) FEM: multiphysics simulation of MEMS-sensors based on silicon with pizoelectric thin-film layers and etched quartz crystals
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Updated
Apr 29, 2024 - Roff
ANSYS(TM) FEM: multiphysics simulation of MEMS-sensors based on silicon with pizoelectric thin-film layers and etched quartz crystals
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Papers & Publications
FASENS: POLYTEC + GAIN-PHASE Messungen, Modenprofilaufnahme, Abgriff: optisch, Stahlträger geklebt. Si-Membran + ZnO-Schicht M7-2/3
FASENS-Messprotokolle: optische POLYTEC + elektrische Impedanz/GAIN-PHASE Messungen an Silizium-Strukturen
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